Williams, James S.; Tabbal, Malek; Christidis, Theodore C.; Madi, Charbel; Charnvanichborikarn, Supakit; Aziz, Michael(Proceedings of SPIE, 2007)Link to Published Version
Tabbal, Malek; Goldman, R.S.; Kim, Taegon; Warrender, Jeffrey M.; Cardozo, B.L.; Aziz, Michael(Journal of Vacuum Science and Technology B, 2007)Link to Published Version