Browsing Faculty of Arts and Sciences by Keyword "dielectrics"
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Water Diffusion and Fracture Behavior in Nano-Porous Low-K Dielectric Film Stacks
(American Institute of Physics, 2009)Among various low-dielectric constant (‘low-k’) materials under development, organosilicate glasses (OSG) containing nanometer-size pores are leading candidates for use as intra-metal dielectrics in future microelectronics ...