Browsing Faculty of Arts and Sciences by Keyword "high-k dielectric thin films"
Now showing items 1-2 of 2
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Atomic Layer Deposition of \(Sc_2O_3\) for Passivating AlGaN/GaN High Electron Mobility Transistor Devices
(American Institute of Physics, 2012)Polycrystalline, partially epitaxial \(Sc_2O_3\) films were grown on AlGaN/GaN substrates by atomic layer deposition (ALD). With this ALD \(Sc_2O_3\) film as the insulator layer, the \(Sc_2O_3\)/AlGaN/GaN metal-insulator- ... -
Low Temperature Epitaxial Growth of High Permittivity Rutile \(TiO_2\) on \(SnO_2\)
(Electrochemical Society, 2010)Thin films of high dielectric constant \(\kappa \sim 68\) rutile phase titanium dioxide \(TiO_2\) were grown epitaxially on tin dioxide \(SnO_2\) substrates, which are a low cost, more abundant alternative to ruthenium ...