Paper-based piezoresistive MEMS sensors
View/ Open
Author
Liu, Xinyu
Mwangi, Martin
Li, XiuJun
Note: Order does not necessarily reflect citation order of authors.
Published Version
https://doi.org/10.1039/C1LC20161AMetadata
Show full item recordCitation
Liu, Xinyu, Martin Mwangi, XiuJun Li, Michael O’Brien, and George M. Whitesides. 2011. “Paper-Based Piezoresistive MEMS Sensors.” Lab on a Chip 11, no. 13: 2189-2196.Abstract
This paper describes the development of piezoresistive MEMS force sensors constructed using paper as the structural material. The sensing principle of the paper-based sensor is based on the piezoresistive effect of conductive materials patterned on a paper substrate. The device is inexpensive (~$0.04/device for materials), simple to fabricate, lightweight, and disposable. The entire fabrication process can be completed within one hour in common laboratories with simple tools (e.g., a paper cutter and a painting knife), without requiring cleanroom facilities. The paper substrate allows easy integration of electrical signal processing circuits onto the paper-based MEMS devices. We demonstrated that the paper-based sensor can measure forces with moderate performance (i.e., detection limit: 120 μN, measurement range: ±16 mN, and sensitivity: 0.84 mV/mN), and applied the sensor to characterizing mechanical properties of soft materials. We also developed a paper-based weighting balance with a measurement range of 15 g and a resolution of 25 mg.Terms of Use
This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAPCitable link to this page
http://nrs.harvard.edu/urn-3:HUL.InstRepos:12967808
Collections
- FAS Scholarly Articles [18292]
Contact administrator regarding this item (to report mistakes or request changes)