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    • An Ice Lithography Instrument 

      Han, Anpan; Chervinsky, John F.; Branton, Daniel; Golovchenko, Jene A. (American Institute of Physics, 2011)
      We describe the design of an instrument that can fully implement a new nanopatterning method called ice lithography, where ice is used as the resist. Water vapor is introduced into a scanning electron microscope (SEM) ...