Kinetic Energy Induced Smoothening and Delay of Epitaxial Breakdown in Pulsed-laser Deposition

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Kinetic Energy Induced Smoothening and Delay of Epitaxial Breakdown in Pulsed-laser Deposition

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dc.contributor.author Shin, Byungha
dc.contributor.author Aziz, Michael
dc.date.accessioned 2009-04-14T17:56:04Z
dc.date.issued 2007
dc.identifier.citation Shin, Byungha and Michael J. Aziz. 2007. Kinetic energy induced smoothening and delay of epitaxial breakdown in pulsed laser deposition. Physical Review B 76(8): 085431. en
dc.identifier.issn 1098-0121 en
dc.identifier.uri http://nrs.harvard.edu/urn-3:HUL.InstRepos:2795319
dc.description.abstract We have isolated the effect of kinetic energy of depositing species from the effect of flux pulsing during pulsed-laser deposition (PLD) on surface morphology evolution of Ge(001) homoepitaxy at low temperature (100 degrees C). Using a dual molecular beam epitaxy (MBE) PLD chamber, we compare morphology evolution from three different growth methods under identical experimental conditions except for the differing nature of the depositing flux: (a) PLD with average kinetic energy 300 eV (PLD-KE); (b) PLD with suppressed kinetic energy comparable to thermal evaporation energy (PLD-TH); and (c) MBE. The thicknesses at which epitaxial breakdown occurs are ranked in the order PLD-KE>MBE>PLD-TH; additionally, the surface is smoother in PLD-KE than in MBE. The surface roughness of the films grown by PLD-TH cannot be compared due to the early epitaxial breakdown. These results demonstrate convincingly that kinetic energy is more important than flux pulsing in the enhancement of epitaxial growth, i.e., the reduction in roughness and the delay of epitaxial breakdown. en
dc.description.sponsorship Engineering and Applied Sciences en
dc.language.iso en_US en
dc.publisher The American Physical Society en
dc.relation.isversionof http://dx.doi.org/10.1103/PhysRevB.76.085431 en
dash.license LAA
dc.subject electron correlations en
dc.subject quantum dots en
dc.subject Wigner crystal en
dc.subject Monte Carlo methods en
dc.subject electron gas en
dc.title Kinetic Energy Induced Smoothening and Delay of Epitaxial Breakdown in Pulsed-laser Deposition en
dc.relation.journal Physical Review B en
dash.depositing.author Aziz, Michael

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  • FAS Scholarly Articles [6463]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University

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