dc.contributor.author | Li, Jiali | |
dc.contributor.author | Stein, Derek | |
dc.contributor.author | McMullan, Ciaran | |
dc.contributor.author | Branton, Daniel | |
dc.contributor.author | Aziz, Michael | |
dc.contributor.author | Golovchenko, Jene | |
dc.date.accessioned | 2009-04-20T20:46:11Z | |
dc.date.issued | 2001 | |
dc.identifier.citation | Li, Jiali, Derek Stein, Ciaran McMullan, Daniel Branton, Michael J. Aziz, and Jene A. Golovchenko. 2001. Ion-beam sculpting at nanometre length scales. Nature 412(6843): 166-169. | en |
dc.identifier.issn | 0028-0836 | en |
dc.identifier.uri | http://nrs.harvard.edu/urn-3:HUL.InstRepos:2797422 | |
dc.description.abstract | Manipulating matter at the nanometre scale is important for many electronic, chemical and biological advances, but present solid-state fabrication methods do not reproducibly achieve dimensional control at the nanometre scale. Here we report a means of fashioning matter at these dimensions that uses low-energy ion beams and reveals surprising atomic transport phenomena that occur in a variety of materials and geometries. The method is implemented in a feedback-controlled sputtering system that provides fine control over ion beam exposure and sample temperature. We call the method "ion-beam sculpting", and apply it to the problem of fabricating a molecular-scale hole, or nanopore, in a thin insulating solid-state membrane. Such pores can serve to localize molecular-scale electrical junctions and switches, and function as masks to create other small-scale structures. Nanopores also function as membrane channels in all living systems, where they serve as extremely sensitive electro-mechanical devices that regulate electric potential, ionic flow, and molecular transport across cellular membranes. We show that ion-beam sculpting can be used to fashion an analogous solid-state device: a robust electronic detector consisting of a single nanopore in a Si<sub>3</sub>N<sub>4</sub> membrane, capable of registering single DNA molecules in aqueous solution. | en |
dc.description.sponsorship | Physics | en |
dc.description.sponsorship | Engineering and Applied Sciences | en |
dc.description.sponsorship | Molecular and Cellular Biology | en |
dc.language.iso | en_US | en |
dc.publisher | Nature Publishing Group | en |
dc.relation.isversionof | http://dx.doi.org/10.1038/35084037 | en |
dc.relation.hasversion | http://www.seas.harvard.edu/matsci/people/aziz/publications/mja136.pdf | en |
dash.license | LAA | |
dc.title | Ion-beam Sculpting at Nanometre Length Scales | en |
dc.type | Journal Article | |
dc.description.version | Accepted Manuscript | |
dc.relation.journal | Nature | en |
dash.depositing.author | Aziz, Michael | |
dc.identifier.doi | 10.1038/35084037 | * |
dash.contributor.affiliated | Branton, Daniel | |
dash.contributor.affiliated | Aziz, Michael | |
dash.contributor.affiliated | Golovchenko, Jene | |