Nanoscale Morphology Control Using Ion Beams

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Nanoscale Morphology Control Using Ion Beams

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Title: Nanoscale Morphology Control Using Ion Beams
Author: Aziz, Michael
Citation: Aziz, Michael J. 2006. Nanoscale Morphology Control Using Ion Beams. In On Beam Science: Solved and Unsolved Problems: Invited Lectures Presented at a Symposium Arranged by the Royal Danish Academy of Sciences and Letters, Copenhagen, 1-5 May 2006, ed. Peter Sigmund, 187-206. Pt. II. Matematisk-fysiske meddelelser, 52:2. Copenhagen: Det Kongelige Danske Videnskabernes Selskab.
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Abstract: Ion irradiation of a solid surface can be used to control surface morphology
on length scales from 1 micron to 1 nanometer. Focused or unfocused
ion irradiation induces a spontaneous self-organization of the surface into
nanometer-sized ripples, dots, or holes; it also induces diameter increases and
decreases in pre-existing nanopores. The phenomenology of the surface morphological
evolution under ion beam erosion is reviewed with an emphasis
on semiconducting materials, including recent experiments on the influence
of boundary conditions on guiding self-organized pattern formation; the development
of shock fronts that sharpen features at sufficiently steep angles;
and the kinetics governing the fabrication of nanopores for single-biomolecule
detectors. The theory underlying the surface morphology evolution is reviewed
and areas of agreement and disagreement with experiment are identified.
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