Nanometer Patterning with Ice

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Nanometer Patterning with Ice

Show simple item record Golovchenko, Jene Schurmann, Gregor Branton, Daniel King, Gavin M. 2009-06-16T18:56:35Z 2005
dc.identifier.citation King, Gavin M., Gregor Schurmann, Daniel Branton, and Jene A. Golovchenko. 2005. Nanometer patterning with ice. Nano Letters 5(6): 1157-1160. en
dc.identifier.issn 1530-6984 en
dc.description.abstract Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful. en
dc.description.sponsorship Engineering and Applied Sciences en
dc.description.sponsorship Molecular and Cellular Biology en
dc.language.iso en_US en
dc.publisher American Chemical Society en
dc.relation.isversionof en
dc.relation.hasversion en
dash.license LAA
dc.title Nanometer Patterning with Ice en
dc.type Journal Article
dc.description.version Version of Record
dc.relation.journal Nano Letters en Branton, Daniel

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