Nanometer Patterning with Ice

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Nanometer Patterning with Ice

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dc.contributor.author Golovchenko, Jene
dc.contributor.author Schurmann, Gregor
dc.contributor.author Branton, Daniel
dc.contributor.author King, Gavin M.
dc.date.accessioned 2009-06-16T18:56:35Z
dc.date.issued 2005
dc.identifier.citation King, Gavin M., Gregor Schurmann, Daniel Branton, and Jene A. Golovchenko. 2005. Nanometer patterning with ice. Nano Letters 5(6): 1157-1160. en
dc.identifier.issn 1530-6984 en
dc.identifier.uri http://nrs.harvard.edu/urn-3:HUL.InstRepos:3109370
dc.description.abstract Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful. en
dc.description.sponsorship Engineering and Applied Sciences en
dc.description.sponsorship Molecular and Cellular Biology en
dc.language.iso en_US en
dc.publisher American Chemical Society en
dc.relation.isversionof http://dx.doi.org/10.1021/nl050405n en
dc.relation.hasversion http://www.mcb.harvard.edu/branton/KingEtAl.pdf en
dash.license LAA
dc.title Nanometer Patterning with Ice en
dc.type Journal Article
dc.description.version Version of Record
dc.relation.journal Nano Letters en
dash.depositing.author Branton, Daniel

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  • FAS Scholarly Articles [7218]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University

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