Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition
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| dc.contributor.author |
Gordon, Roy Gerald
|
|
| dc.contributor.author |
Lim, Booyong S. |
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| dc.contributor.author |
Li, Zhengwen |
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| dc.contributor.author |
Aaltonen, Titta |
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| dc.contributor.author |
Li, Huazhi |
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| dc.date.accessioned |
2009-10-13T15:35:53Z |
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| dc.date.issued |
2008 |
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| dc.identifier.citation |
Li, Huazhi, Titta Aaltonen, Zhengwen Li, Booyong S. Lim, Roy G. Gordon. 2008. Synthesis and characterization of ruthenium amidinate complexes as precursors for vapor deposition. The Open Inorganic Chemistry Journal 2: 11-17. |
en_US |
| dc.identifier.issn |
1874-0987 |
en_US |
| dc.identifier.uri |
http://nrs.harvard.edu/urn-3:HUL.InstRepos:3347569 |
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| dc.description.abstract |
Three new ruthenium amidinate complexes were prepared: tris(diisopropylacetamidinato)-ruthenium(III), Ru(iPrNC(Me)NiPr)3 4; bis(diisopropyl-acetamidinato)ruthenium(II) dicarbonyl, Ru(iPrNC(Me)NiPr)2(CO)2 5; and bis(ditert- butylacetamidinato)ruthenium(II) dicarbonyl, Ru(tBuNC(Me)NtBu)2(CO)2 6. They have been synthesized and characterized by 1H NMR, TG and X-ray structure analysis. These three complexes were found to be monomeric and air stable. Compound 6 was found to have sufficient volatility and thermal stability for use in chemical vapor deposition (CVD) and atomic layer deposition (ALD) of ruthenium metal films. |
en_US |
| dc.description.sponsorship |
Chemistry and Chemical Biology |
en_US |
| dc.language.iso |
en_US |
en_US |
| dc.publisher |
Bentham Science |
en_US |
| dc.relation.isversionof |
http://dx.doi.org/10.2174/1874098700802010011 |
en_US |
| dc.relation.hasversion |
http://www.chem.harvard.edu/groups/gordon/publicationsearch.html |
en_US |
| dash.license |
OAP |
|
| dc.subject |
amidinate |
en_US |
| dc.subject |
ALD |
en_US |
| dc.subject |
CVD |
en_US |
| dc.subject |
ruthenium |
en_US |
| dc.title |
Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition |
en_US |
| dc.type |
Journal Article |
en_US |
| dc.description.version |
Version of Record |
en_US |
| dc.relation.journal |
The Open Inorganic Chemistry Journal |
en_US |
| dash.depositing.author |
Gordon, Roy Gerald
|
|
| dc.date.available |
2009-10-13T15:35:53Z |
|
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FAS Scholarly Articles [5137]
Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University
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