Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition

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Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition

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dc.contributor.author Gordon, Roy Gerald
dc.contributor.author Lim, Booyong S.
dc.contributor.author Li, Zhengwen
dc.contributor.author Aaltonen, Titta
dc.contributor.author Li, Huazhi
dc.date.accessioned 2009-10-13T15:35:53Z
dc.date.issued 2008
dc.identifier.citation Li, Huazhi, Titta Aaltonen, Zhengwen Li, Booyong S. Lim, Roy G. Gordon. 2008. Synthesis and characterization of ruthenium amidinate complexes as precursors for vapor deposition. The Open Inorganic Chemistry Journal 2: 11-17. en_US
dc.identifier.issn 1874-0987 en_US
dc.identifier.uri http://nrs.harvard.edu/urn-3:HUL.InstRepos:3347569
dc.description.abstract Three new ruthenium amidinate complexes were prepared: tris(diisopropylacetamidinato)-ruthenium(III), Ru(iPrNC(Me)NiPr)3 4; bis(diisopropyl-acetamidinato)ruthenium(II) dicarbonyl, Ru(iPrNC(Me)NiPr)2(CO)2 5; and bis(ditert- butylacetamidinato)ruthenium(II) dicarbonyl, Ru(tBuNC(Me)NtBu)2(CO)2 6. They have been synthesized and characterized by 1H NMR, TG and X-ray structure analysis. These three complexes were found to be monomeric and air stable. Compound 6 was found to have sufficient volatility and thermal stability for use in chemical vapor deposition (CVD) and atomic layer deposition (ALD) of ruthenium metal films. en_US
dc.description.sponsorship Chemistry and Chemical Biology en_US
dc.language.iso en_US en_US
dc.publisher Bentham Science en_US
dc.relation.isversionof http://dx.doi.org/10.2174/1874098700802010011 en_US
dc.relation.hasversion http://www.chem.harvard.edu/groups/gordon/publicationsearch.html en_US
dash.license OAP
dc.subject amidinate en_US
dc.subject ALD en_US
dc.subject CVD en_US
dc.subject ruthenium en_US
dc.title Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition en_US
dc.type Journal Article en_US
dc.description.version Version of Record en_US
dc.relation.journal The Open Inorganic Chemistry Journal en_US
dash.depositing.author Gordon, Roy Gerald
dc.date.available 2009-10-13T15:35:53Z

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  • FAS Scholarly Articles [7594]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University

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