Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films

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Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films

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Title: Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films
Author: McCluskey, Patrick James; Vlassak, Joost J.

Note: Order does not necessarily reflect citation order of authors.

Citation: McCluskey, Patrick James, and Joost J. Vlassak. Forthcoming. Nano-thermal transport array: An instrument for combinatorial measurements of heat transfer in nanoscale films. Thin Solid Films 518.
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Abstract: The nano-Thermal Transport Array is a silicon-based micromachined device for measuring the thermal properties of nanoscale materials in a high-throughput methodology. The device contains an array of thermal sensors, each one of which consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The thermal behavior of the sensors is described with an analytical model. The assumptions underlying this model and its accuracy are checked using the finite element method. The analytical model is used in a data reduction scheme that relates experimental quantities to materials properties. Measured properties include thermal effusivity, thermal conductivity, and heat capacity. While the array is specifically designed for combinatorial analysis, here we demonstrate the capabilities of the device with a high-throughput study of copper multi-layer films as a function of film thickness, ranging from 15 to 470 nm. Thermal conductivity results show good agreement with earlier models predicting the conductivity based on electron scattering at interfaces.
Published Version: doi:10.1016/j.tsf.2010.05.124
Terms of Use: This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:4317715

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  • FAS Scholarly Articles [7106]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University
 
 

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