Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films

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Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films

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dc.contributor.author McCluskey, Patrick James
dc.contributor.author Vlassak, Joost J.
dc.date.accessioned 2010-07-26T13:46:51Z
dc.date.issued 2010
dc.identifier.citation McCluskey, Patrick James, and Joost J. Vlassak. Forthcoming. Nano-thermal transport array: An instrument for combinatorial measurements of heat transfer in nanoscale films. Thin Solid Films 518. en_US
dc.identifier.issn 0040-6090 en_US
dc.identifier.uri http://nrs.harvard.edu/urn-3:HUL.InstRepos:4317715
dc.description.abstract The nano-Thermal Transport Array is a silicon-based micromachined device for measuring the thermal properties of nanoscale materials in a high-throughput methodology. The device contains an array of thermal sensors, each one of which consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The thermal behavior of the sensors is described with an analytical model. The assumptions underlying this model and its accuracy are checked using the finite element method. The analytical model is used in a data reduction scheme that relates experimental quantities to materials properties. Measured properties include thermal effusivity, thermal conductivity, and heat capacity. While the array is specifically designed for combinatorial analysis, here we demonstrate the capabilities of the device with a high-throughput study of copper multi-layer films as a function of film thickness, ranging from 15 to 470 nm. Thermal conductivity results show good agreement with earlier models predicting the conductivity based on electron scattering at interfaces. en_US
dc.description.sponsorship Engineering and Applied Sciences en_US
dc.language.iso en_US en_US
dc.publisher Elsevier en_US
dc.relation.isversionof doi:10.1016/j.tsf.2010.05.124 en_US
dash.license OAP
dc.subject nanoscale en_US
dc.subject high-throughput en_US
dc.subject combinatorial en_US
dc.subject specific heat en_US
dc.subject thermal effusivity en_US
dc.subject thermal conductivity en_US
dc.subject emissivity en_US
dc.subject copper en_US
dc.title Nano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Films en_US
dc.type Journal Article en_US
dc.description.version Accepted Manuscript en_US
dc.relation.journal Thin Solid Films en_US
dash.depositing.author Vlassak, Joost J.
dc.date.available 2010-07-26T13:46:51Z

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  • FAS Scholarly Articles [7176]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University

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