Low Temperature Atomic Layer Deposition of Tin Dioxide, SnO\(_2\)

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Low Temperature Atomic Layer Deposition of Tin Dioxide, SnO\(_2\)

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Title: Low Temperature Atomic Layer Deposition of Tin Dioxide, SnO\(_2\)
Author: Heo, Jae Yeong; Hock, Adam S.; Gordon, Roy Gerald

Note: Order does not necessarily reflect citation order of authors.

Citation: Heo, Jaeyeong, Adam S. Hock, and Roy G. Gordon. 2010. Low temperature atomic layer deposition of tin dioxide, SnO\(_2\). Presentation slides. 10th International Conference on Atomic Layer Deposition. Seoul, South Korea.
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Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:8961464

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  • FAS Scholarly Articles [7262]
    Peer reviewed scholarly articles from the Faculty of Arts and Sciences of Harvard University
 
 

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