Browsing by Author "Li, Zhefeng"
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Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films
Li, Zhefeng; Gordon, Roy Gerald; Pallem, Venkateswara; Li, Huazhi; Shenai, Deo V. (American Chemical Society, 2010)Smooth and continuous films of nickel nitride (NiNx) with excellent step coverage were deposited from a novel nickel amidinate precursor, Ni(MeC(NtBu)2)2, and either ammonia (NH3) or a mixture of NH3 and hydrogen (H2) gases ... -
Quantitative Evaluation of Cobalt Disilicide/Si Interfacial Roughness
Yang, Jing; Feng, Jun; Li, Kecheng; Bhandari, Harish; Li, Zhefeng; Gordon, Roy Gerald (The Electrochemical Society, 2017)The formation of smooth, conformal cobalt disilicide (CoSi2) without facets or voids is critical for microelectronic device reliability owing to the ultra-shallow contact areas. Here we demonstrate the formation of smooth ...