Browsing by Author "Gong, Xian"
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ALD Growth of MgxCa1xO on GaN and Its Band Offset Analysis
Gong, Xian; Lou, Xiabing; Kim, Sang Bok; Gordon, Roy (American Chemical Society (ACS), 2021-02-08)Atomic layer deposition (ALD) processes were developed for growing MgO and CaO on GaN substrates using a home-built ALD reactor with amidinate-based precursors. An optimal deposition condition was then determined to deposit ... -
Direct-Liquid-Evaporation Chemical Vapor Deposition of Nanocrystalline Cobalt Metal for Nanoscale Copper Interconnect Encapsulation
Feng, Jun; Gong, Xian; Lou, Xiabing; Gordon, Roy Gerald (American Chemical Society (ACS), 2017)In advanced microelectronics, precise design of liner and capping layers become critical, especially when it comes to the fabrication of Cu interconnects with dimensions lower than its mean free path. Herein, we demonstrate ... -
Epitaxial Growth of MgxCa1–xO on GaN by Atomic Layer Deposition
Lou, Xiabing; Zhou, Hong; Kim, Sang Bok; Alghamdi, Sami; Gong, Xian; Feng, Jun; Wang, Xinwei; Ye, Peide D.; Gordon, Roy Gerald (American Chemical Society (ACS), 2016)We demonstrate for the first time that a singlecrystalline epitaxial MgxCa1−xO film can be deposited on gallium nitride (GaN) by atomic layer deposition (ALD). By adjusting the ratio between the amounts of Mg and Ca in the ... -
Synthesis of Volatile, Reactive Coinage Metal 5,5-Bicyclic Amidinates With Enhanced Thermal Stability for Chemical Vapor Deposition
Tong, Liuchuan; Gong, Xian; Feng, Jun; Gordon, Roy; Davis, Luke; Beth, Eugene (Royal Society of Chemistry (RSC), 2019)Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver(I) and gold(I) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal ... -
Vapor Deposition of Copper-Manganese Interconnects
Gordon, Roy Gerald; Feng, Jun; Li, Kecheng; Gong, Xian (IEEE, 2016)Chemical vapor deposition (CVD) of copper and manganese can produce interconnects scaled down to below 10 nm, while enhancing their conductivity and lifetime. CVD using similar super-conformal processes can enable very ...