Browsing by Keyword "thin film deposition"
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Applications of Various Thin Film Deposition Techniques for Oxide Dielectrics, Metal Interconnects and Polymer Insulators
(2022-06-06)As the feature size gradually approaches the physical limit, the downscaling of the semiconductor industry guided by Moore’s law has encounter many challenges. However, recent advances in thin-film materials and deposition ... -
High quality crystalline YBa2Cu3O7−δ films on thin silicon substrates
(AIP Publishing, 1994)YBa2Cu3O7−δ(001) (YBCO)films with near perfect crystallinity have been grown epitaxially on Si(100) using two intermediate buffer layers: Yttrium‐stabilized zirconia (YSZ) and CeO2. All layers were grown by an in situpulsed ...