Browsing Faculty of Arts and Sciences by Keyword "atomic layer epitaxial growth"
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Low Temperature Epitaxial Growth of High Permittivity Rutile \(TiO_2\) on \(SnO_2\)
(Electrochemical Society, 2010)Thin films of high dielectric constant \(\kappa \sim 68\) rutile phase titanium dioxide \(TiO_2\) were grown epitaxially on tin dioxide \(SnO_2\) substrates, which are a low cost, more abundant alternative to ruthenium ...