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Study of surface crystallinity and stoichiometry of laser annealed GaAs using time resolved reflectivity and channeling
(American Institute of Physics, 1979)
The surface crystallinity ans stoichiometry of tellurium implanted GaAs annealed with a frequency doubled Nd glass laser using time resolved reflectivity and channeling measurements has been studied. By optimizing the ...
Dynamics of Q-switched laser annealing
(AIP Publishing, 1979)
Using time‐resolved optical‐reflectivity measurements, the duration of the thin liquid layer accompanying Q‐switched laser annealing in Si, Ge, and GaAs has been determined. The duration of this melted layer has been studied ...
Calculation of the dynamics of surface melting during laser annealing
(AIP Publishing, 1979)
We present a thermal transport model to describe the melting and resolidification of semiconductors which is observed to occur during annealing with a pulsed laser. The temperature‐dependent properties of both the solid ...