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Dual-wavelength laser annealing
(AIP Publishing, 1979)
A simple and efficient method of annealing ion‐implantation damage in semiconductors is demonstrated which utilizes a relatively weak optical pulse in the visible to initiate surface melting in combination with a more ...
Calculation of the dynamics of surface melting during laser annealing
(AIP Publishing, 1979)
We present a thermal transport model to describe the melting and resolidification of semiconductors which is observed to occur during annealing with a pulsed laser. The temperature‐dependent properties of both the solid ...