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dc.contributor.authorGeorge, H. Bola
dc.contributor.authorHoogerheide, David Paul
dc.contributor.authorMadi, Charbel S.
dc.contributor.authorBell, David C.
dc.contributor.authorGolovchenko, Jene A.
dc.contributor.authorAziz, Michael J.
dc.date.accessioned2013-02-26T17:00:07Z
dc.date.issued2010
dc.identifier.citationGeorge, H. Bola, David P. Hoogerheide, Charbel S. Madi, David C. Bell, Jene A. Golovchenko, and Michael J. Aziz. 2010. Ion-sculpting of nanopores in amorphous metals, semiconductors and insulators. Applied Physics Letters 96, no.26: 263111.en_US
dc.identifier.issn0003-6951en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:10345122
dc.description.abstractWe report the closure of nanopores to single-digit nanometer dimensions by ion sculpting in a range of amorphous materials including insulators (SiO\(_2\) and SiN), semiconductors (a-Si), and metallic glasses (Pd\(_{80}\)Si\(_{20}\)) — the building blocks of a single-digit nanometer electronic device. Ion irradiation of nanopores in crystalline materials (Pt and Ag) does not cause nanopore closure. Ion irradiation of c-Si pores below 100 °C and above 600 °C, straddling the amorphous-crystalline dynamic transition temperature, yields closure at the lower temperature but no mass transport at the higher temperature. Ion beam nanosculpting appears to be restricted to materials that either are or become amorphous during ion irradiation.en_US
dc.description.sponsorshipEngineering and Applied Sciencesen_US
dc.description.sponsorshipPhysicsen_US
dc.language.isoen_USen_US
dc.publisherAmerican Institute of Physicsen_US
dc.relation.isversionofdoi:10.1063/1.3441406en_US
dash.licenseOAP
dc.titleIon-sculpting of Nanopores in Amorphous Metals, Semiconductors and Insulatorsen_US
dc.typeJournal Articleen_US
dc.description.versionAccepted Manuscripten_US
dc.relation.journalApplied Physics Lettersen_US
dash.depositing.authorAziz, Michael J.
dc.date.available2013-02-26T17:00:07Z
dc.identifier.doi10.1063/1.3441406*
dash.contributor.affiliatedGolovchenko, Jene
dash.contributor.affiliatedHoogerheide, David Paul
dash.contributor.affiliatedBell, David
dash.contributor.affiliatedAziz, Michael


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