Browsing FAS Scholarly Articles by Keyword "ALD"
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ALD Growth of MgxCa1xO on GaN and Its Band Offset Analysis
(American Chemical Society (ACS), 2021-02-08)Atomic layer deposition (ALD) processes were developed for growing MgO and CaO on GaN substrates using a home-built ALD reactor with amidinate-based precursors. An optimal deposition condition was then determined to deposit ... -
On the relative stability of cobalt- and nickel-based amidinate complexes against ?-migration
(Wiley-Blackwell, 2009)We present a first-principles study on the relative stability of cobalt- and nickel-based amidinate complexes against β-migration using density functional theory. Factors that influence the reactivity of these compounds ... -
Synthesis and Characterization of Ruthenium Amidinate Complexes as Precursors for Vapor Deposition
(Bentham Science, 2008)Three new ruthenium amidinate complexes were prepared: tris(diisopropylacetamidinato)-ruthenium(III), Ru(iPrNC(Me)NiPr)3 4; bis(diisopropyl-acetamidinato)ruthenium(II) dicarbonyl, Ru(iPrNC(Me)NiPr)2(CO)2 5; and bis(ditert- ...