Ion-Beam Sculpting Time Scales

DSpace/Manakin Repository

Ion-Beam Sculpting Time Scales

Citable link to this page

 

 
Title: Ion-Beam Sculpting Time Scales
Author: Stein, Derek; Li, Jiali; Golovchenko, Jene Andrew

Note: Order does not necessarily reflect citation order of authors.

Citation: Stein, Derek, Jiali Li, and Jene A. Golovchenko. 2002. “Ion-Beam Sculpting Time Scales.” Physical Review Letters 89 (27) (December). doi:10.1103/physrevlett.89.276106.
Full Text & Related Files:
Abstract: A study of ion sculpting dynamics in SiO2 and SiN using periodically pulsed ion beams reveals material transport that depends strongly on the time structure of the pulsed beams. It is found that significant nanoscale matter transport can occur over second long time scales after the ion beam has been extinguished. A simple phenomenological model described the dynamics of ion beam sculpting in terms of two material time scales. The model accounts for the surprising observation of enhanced matter transport affected by pulsed ion beams over continuous ion beam exposure.
Published Version: doi:10.1103/PhysRevLett.89.276106
Other Sources: http://golovchenko.physics.harvard.edu/IonBeamSculptingTimescales.pdf
Terms of Use: This article is made available under the terms and conditions applicable to Other Posted Material, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#LAA
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:21976373
Downloads of this work:

Show full Dublin Core record

This item appears in the following Collection(s)

 
 

Search DASH


Advanced Search
 
 

Submitters