dc.contributor.author | Zhao, Yuechao | |
dc.contributor.author | Aziz, Michael | |
dc.contributor.author | Mitha, Salman | |
dc.contributor.author | Schiferl, David | |
dc.date.accessioned | 2009-04-30T13:52:05Z | |
dc.date.issued | 1997 | |
dc.identifier.citation | Zhao, Yuechao, Michael J. Aziz, Salman Mitha, and David Schiferl. 1997. Effect of pressure on Boron diffusion in Silicon. Materials Research Society Symposia Proceedings 442: 305-411. | en |
dc.identifier.issn | 0272-9172 | en |
dc.identifier.uri | http://nrs.harvard.edu/urn-3:HUL.InstRepos:2870608 | |
dc.description.abstract | We are studying the effect of pressure on boron diffusion in silicon in order to better understand the nature of the point defects responsible for diffusion. Si homoepitaxial layers delta-doped with boron were grown using molecular beam epitaxy. Diffusion anneals were performed in a high temperature diamond anvil cell using fluid argon as a pressure medium. Diffusivities were deduced from B concentration-depth profiles measured with using secondary ion mass spectrometry. Preliminary results indicate that pressure enhances B diffusion in Si at 850 ˚C, characterized by an average activation volume of -0.125±0.02 times the atomic volume, and thus appear consistent with an interstitial-based diffusion mechanism. Results are compared with previous hydrostatic-pressure studies, with results in biaxially strained films, and with atomistic calculations of activation volumes for self diffusion. | en |
dc.description.sponsorship | Engineering and Applied Sciences | en |
dc.language.iso | en_US | en |
dc.publisher | Materials Research Society | en |
dc.relation.isversionof | http://www.mrs.org/s_mrs/sec.asp?CID=1727&DID=38980 | en |
dc.relation.hasversion | http://www.seas.harvard.edu/matsci/people/aziz/publications/mja093.pdf | en |
dash.license | LAA | |
dc.title | Effect of Pressure on Boron Diffusion in Silicon | en |
dc.relation.journal | Materials Research Society Symposia Proceedings | en |
dash.depositing.author | Aziz, Michael | |
dash.contributor.affiliated | Aziz, Michael | |