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dc.contributor.authorKim, Sang Boken_US
dc.contributor.authorYang, Chuanxien_US
dc.contributor.authorPowers, Tamaraen_US
dc.contributor.authorDavis, Luke M.en_US
dc.contributor.authorLou, Xiabingen_US
dc.contributor.authorGordon, Roy G.en_US
dc.date.accessioned2016-12-02T15:26:00Z
dc.date.issued2016en_US
dc.identifier.citationKim, Sang Bok, Chuanxi Yang, Tamara Powers, Luke M. Davis, Xiabing Lou, and Roy G. Gordon. 2016. “Synthesis of Calcium(II) Amidinate Precursors for Atomic Layer Deposition through a Redox Reaction between Calcium and Amidines.” Angewandte Chemie (International Ed. in English) 55 (35): 10228-10233. doi:10.1002/anie.201602406. http://dx.doi.org/10.1002/anie.201602406.en
dc.identifier.issn1433-7851en
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:29626196
dc.description.abstractAbstract We have prepared two new CaII amidinates, which comprise a new class of ALD precursors. The syntheses proceed by a direct reaction between Ca metal and the amidine ligands in the presence of ammonia. Bis(N,N′‐diisopropylformamidinato)calcium(II) (1) and bis(N,N′‐diisopropylacetamidinato)calcium(II) (2) adopt dimeric structures in solution and in the solid state. X‐ray crystallography revealed asymmetry in one of the bridging ligands to afford the structure [(η2‐L)Ca(μ‐η2:η2‐L)(μ‐η2:η1‐L)Ca(η2‐L)]. These amidinate complexes showed unprecedentedly high volatility as compared to the widely employed and commercially available CaII precursor, [Ca3(tmhd)6]. In CaS ALD with 1 and H2S, the ALD window was approximately two times wider and lower in temperature by about 150 °C than previously reported with [Ca3(tmhd)6] and H2S. Complexes 1 and 2, with their excellent volatility and thermal stability (up to at least 350 °C), are the first homoleptic CaII amidinates suitable for use as ALD precursors.en
dc.language.isoen_USen
dc.publisherJohn Wiley and Sons Inc.en
dc.relation.isversionofdoi:10.1002/anie.201602406en
dc.relation.hasversionhttp://www.ncbi.nlm.nih.gov/pmc/articles/PMC5094530/pdf/en
dash.licenseLAAen_US
dc.subjectamidinesen
dc.subjectatomic layer depositionen
dc.subjectcalciumen
dc.subjectredox chemistryen
dc.subjectthin filmsen
dc.titleSynthesis of Calcium(II) Amidinate Precursors for Atomic Layer Deposition through a Redox Reaction between Calcium and Amidinesen
dc.typeJournal Articleen_US
dc.description.versionVersion of Recorden
dc.relation.journalAngewandte Chemie (International Ed. in English)en
dash.depositing.authorYang, Chuanxien_US
dc.date.available2016-12-02T15:26:00Z
dc.identifier.doi10.1002/anie.201602406*
dash.contributor.affiliatedDavis, Luke
dash.contributor.affiliatedYang, Chuanxi
dash.contributor.affiliatedLou, Xiabing
dash.contributor.affiliatedGordon, Roy


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