Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography
Hamedi, Mahiar M.
Rubio, Luis M.
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CitationGonidec, Mathieu, Mahiar M. Hamedi, Alex Nemiroski, Luis M. Rubio, Cesar Torres, and George M. Whitesides. 2016. Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography. Nano Letters 16, no. 7: 4125–4132. doi:10.1021/acs.nanolett.6b00952.
AbstractThis paper describes a strategy that uses template-directed self-assembly of µm-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of “template-encoded microlens projection lithography” (TEMPL) enables rapid prototyping of planar, multi-scale patterns of similarly shaped structures with critical dimensions down to ~ 400 nm. Each of these structures is defined by local projection lithography, with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of non-periodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.
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