Nanometer Patterning with Ice

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Nanometer Patterning with Ice

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Title: Nanometer Patterning with Ice
Author: Golovchenko, Jene; Schurmann, Gregor; Branton, Daniel; King, Gavin M.

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Citation: King, Gavin M., Gregor Schurmann, Daniel Branton, and Jene A. Golovchenko. 2005. Nanometer patterning with ice. Nano Letters 5(6): 1157-1160.
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Abstract: Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.
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