dc.contributor.author | King, Gavin M. | |
dc.contributor.author | Schurmann, Gregor | |
dc.contributor.author | Branton, Daniel | |
dc.contributor.author | Golovchenko, Jene | |
dc.date.accessioned | 2009-06-16T18:56:35Z | |
dc.date.issued | 2005 | |
dc.identifier.citation | King, Gavin M., Gregor Schurmann, Daniel Branton, and Jene A. Golovchenko. 2005. Nanometer patterning with ice. Nano Letters 5(6): 1157-1160. | en |
dc.identifier.issn | 1530-6984 | en |
dc.identifier.uri | http://nrs.harvard.edu/urn-3:HUL.InstRepos:3109370 | |
dc.description.abstract | Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful. | en |
dc.description.sponsorship | Engineering and Applied Sciences | en |
dc.description.sponsorship | Molecular and Cellular Biology | en |
dc.language.iso | en_US | en |
dc.publisher | American Chemical Society | en |
dc.relation.isversionof | http://dx.doi.org/10.1021/nl050405n | en |
dc.relation.hasversion | http://www.mcb.harvard.edu/branton/KingEtAl.pdf | en |
dash.license | LAA | |
dc.title | Nanometer Patterning with Ice | en |
dc.type | Journal Article | |
dc.description.version | Version of Record | |
dc.relation.journal | Nano Letters | en |
dash.depositing.author | Branton, Daniel | |
dc.identifier.doi | 10.1021/nl050405n | * |
dash.contributor.affiliated | Branton, Daniel | |
dash.contributor.affiliated | Golovchenko, Jene | |