dc.contributor.author | Burek, Michael John | |
dc.contributor.author | de Leon, Nathalie Pulmones | |
dc.contributor.author | Shields, Brendan John | |
dc.contributor.author | Hausmann, Birgit Judith Maria | |
dc.contributor.author | Chu, Yiwen | |
dc.contributor.author | Quan, Qimin | |
dc.contributor.author | Zibrov, Alexander S | |
dc.contributor.author | Park, Hongkun | |
dc.contributor.author | Lukin, Mikhail D. | |
dc.contributor.author | Loncar, Marko | |
dc.date.accessioned | 2017-08-07T14:53:12Z | |
dc.date.issued | 2012 | |
dc.identifier | Quick submit: 2014-02-24T01:14:46-05:00 | |
dc.identifier.citation | Burek, Michael J., Nathalie P. de Leon, Brendan J. Shields, Birgit J. M. Hausmann, Yiwen Chu, Qimin Quan, Alexander S. Zibrov, Hongkun Park, Mikhail D. Lukin, and Marko Lon?ar. 2012. “Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond.” Nano Letters 12 (12) (December 12): 6084–6089. doi:10.1021/nl302541e. | en_US |
dc.identifier.issn | 1530-6984 | en_US |
dc.identifier.uri | http://nrs.harvard.edu/urn-3:HUL.InstRepos:33717988 | |
dc.description.abstract | A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators. | en_US |
dc.description.sponsorship | Physics | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | American Chemical Society (ACS) | en_US |
dc.relation.isversionof | doi:10.1021/nl302541e | en_US |
dash.license | LAA | |
dc.subject | Nanofabrication; nanophotonics; nanomechanical systems; diamond; photonic crystal | en_US |
dc.title | Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond | en_US |
dc.type | Journal Article | en_US |
dc.date.updated | 2014-02-24T06:16:25Z | |
dc.description.version | Version of Record | en_US |
dc.rights.holder | Mikhail Lukin | |
dc.relation.journal | Nano Letters | en_US |
dash.depositing.author | Lukin, Mikhail D. | |
dc.date.available | 2017-08-07T14:53:12Z | |
dc.identifier.doi | 10.1021/nl302541e | * |
workflow.legacycomments | FAR 2013
Lukin emailed 2016-05-04 AD
Lukin emailed 2017-02-24 MM
meta.dark | en_US |
dash.authorsordered | false | |
dash.contributor.affiliated | Burek, Michael | |
dash.contributor.affiliated | Quan, Qimin | |
dash.contributor.affiliated | Hausmann, Birgit Judith Maria | |
dash.contributor.affiliated | de Leon, Nathalie Pulmones | |
dash.contributor.affiliated | Shields, Brendan John | |
dash.contributor.affiliated | Chu, Yiwen | |
dash.contributor.affiliated | Zibrov, Alexander | |
dash.contributor.affiliated | Lukin, Mikhail | |
dash.contributor.affiliated | Park, Hongkun | |
dash.contributor.affiliated | Loncar, Marko | |