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dc.contributor.authorBurek, Michael John
dc.contributor.authorde Leon, Nathalie Pulmones
dc.contributor.authorShields, Brendan John
dc.contributor.authorHausmann, Birgit Judith Maria
dc.contributor.authorChu, Yiwen
dc.contributor.authorQuan, Qimin
dc.contributor.authorZibrov, Alexander S
dc.contributor.authorPark, Hongkun
dc.contributor.authorLukin, Mikhail D.
dc.contributor.authorLoncar, Marko
dc.date.accessioned2017-08-07T14:53:12Z
dc.date.issued2012
dc.identifierQuick submit: 2014-02-24T01:14:46-05:00
dc.identifier.citationBurek, Michael J., Nathalie P. de Leon, Brendan J. Shields, Birgit J. M. Hausmann, Yiwen Chu, Qimin Quan, Alexander S. Zibrov, Hongkun Park, Mikhail D. Lukin, and Marko Lon?ar. 2012. “Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond.” Nano Letters 12 (12) (December 12): 6084–6089. doi:10.1021/nl302541e.en_US
dc.identifier.issn1530-6984en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:33717988
dc.description.abstractA variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.en_US
dc.description.sponsorshipPhysicsen_US
dc.language.isoen_USen_US
dc.publisherAmerican Chemical Society (ACS)en_US
dc.relation.isversionofdoi:10.1021/nl302541een_US
dash.licenseLAA
dc.subjectNanofabrication; nanophotonics; nanomechanical systems; diamond; photonic crystalen_US
dc.titleFree-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamonden_US
dc.typeJournal Articleen_US
dc.date.updated2014-02-24T06:16:25Z
dc.description.versionVersion of Recorden_US
dc.rights.holderMikhail Lukin
dc.relation.journalNano Lettersen_US
dash.depositing.authorLukin, Mikhail D.
dc.date.available2017-08-07T14:53:12Z
dc.identifier.doi10.1021/nl302541e*
workflow.legacycommentsFAR 2013 Lukin emailed 2016-05-04 AD Lukin emailed 2017-02-24 MM meta.darken_US
dash.authorsorderedfalse
dash.contributor.affiliatedBurek, Michael
dash.contributor.affiliatedQuan, Qimin
dash.contributor.affiliatedHausmann, Birgit Judith Maria
dash.contributor.affiliatedde Leon, Nathalie Pulmones
dash.contributor.affiliatedShields, Brendan John
dash.contributor.affiliatedChu, Yiwen
dash.contributor.affiliatedZibrov, Alexander
dash.contributor.affiliatedLukin, Mikhail
dash.contributor.affiliatedPark, Hongkun
dash.contributor.affiliatedLoncar, Marko


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