Phase Transformation and Impurity Redistribution During Pulsed Laser Irradiation of Amorphous Silicon Layers

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Narayan, J.

White, C.W.

Holland, O.W.

Aziz, Michael J.

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https://doi.org/10.1063/1.334192

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Narayan, J., C.W. White, O.W. Holland, and Michael J. Aziz. 1984. Phase Transformation and impurity redistribution during pulsed laser irradiation of amorphous silicon layers. Journal of Applied Physics 56, no. 6: 1821-1830.

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