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dc.contributor.advisorGordon, Roy G.
dc.contributor.advisorAziz, Michael
dc.contributor.advisorSpaepen, Frans
dc.contributor.authorLou, Xiabing
dc.date.accessioned2019-08-09T09:24:44Z
dash.embargo.terms2018-05-01
dc.date.created2017-05
dc.date.issued2017-05-15
dc.date.submitted2017
dc.identifier.citationLou, Xiabing. 2017. Epitaxial High-K Dielectric Grown by Atomic Layer Deposition on Wide Bandgap Semiconductors. Doctoral dissertation, Harvard University, Graduate School of Arts & Sciences.
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:41142064*
dc.description.abstractWide band gap semiconductors, including GaN, SiC and Ga2O3, are considered as the substrate for next generation power conversion devices. In order to improve the power conversion efficiency, an epitaxial MgxCa1-xO gate dielectric deposited by atomic layer deposition (ALD) is developed in this work. The epitaxial relationship between the MgxCa1-xO film and three substrates are studied with TEM and XRD. The low defects interface of MgxCa1-xO/GaN is confirmed with high temperature capacitance-voltage study. The relationship between band offset and interfacial defects has been established with La2O3/GaAs as an example. Two record breaking high electron mobility transistors (HEMT) with epitaxial MgxCa1-xO as an oxide have been developed. Additionally, a high on/off (1011) enhancement mode HEMT device is developed with a combination of epitaxial MgxCa1-xO dielectric and Fin-FET structure.
dc.description.sponsorshipChemistry and Chemical Biology
dc.format.mimetypeapplication/pdf
dc.language.isoen
dash.licenseLAA
dc.subjectWide band gap semiconductor, epitaxial dielectric, MgCaO, HEMT, band offset.
dc.titleEpitaxial High-K Dielectric Grown by Atomic Layer Deposition on Wide Bandgap Semiconductors
dc.typeThesis or Dissertation
dash.depositing.authorLou, Xiabing
dash.embargo.until2018-05-01
dc.date.available2019-08-09T09:24:44Z
thesis.degree.date2017
thesis.degree.grantorGraduate School of Arts & Sciences
thesis.degree.grantorGraduate School of Arts & Sciences
thesis.degree.levelDoctoral
thesis.degree.levelDoctoral
thesis.degree.nameDoctor of Philosophy
thesis.degree.nameDoctor of Philosophy
dc.type.materialtext
thesis.degree.departmentChemistry and Chemical Biology
thesis.degree.departmentChemistry and Chemical Biology
dash.identifier.vireo
dash.author.emailharbing.lou@gmail.com


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