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dc.contributor.authorTennant, D. M.
dc.contributor.authorColombelli, R.
dc.contributor.authorSrinivasan, K.
dc.contributor.authorTroccoli, M.
dc.contributor.authorPainter, O.
dc.contributor.authorGmachl, C.
dc.contributor.authorCapasso, F.
dc.contributor.authorSergent, A. M.
dc.contributor.authorSivco, D. L.
dc.contributor.authorCho, A. Y.
dc.date.accessioned2019-09-17T15:35:23Z
dc.date.issued2003
dc.identifier.citationTennant, D. M., R. Colombelli, K. Srinivasan, M. Troccoli, O. Painter, C. Gmachl, F. Capasso, A. M. Sergent, D. L. Sivco, and A. Y. Cho. 2003. “Fabrication Methods for a Quantum Cascade Photonic Crystal Surface Emitting Laser.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (6): 2907. https://doi.org/10.1116/1.1627815.
dc.identifier.issn1071-1023
dc.identifier.issn1520-8567
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:41372485*
dc.description.abstractConventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers. 2003 American Vacuum Society.
dc.language.isoen_US
dc.publisherAmerican Vacuum Society
dash.licenseLAA
dc.titleFabrication methods for a quantum cascade photonic crystal surface emitting laser
dc.typeJournal Article
dc.description.versionVersion of Record
dc.relation.journalJournal of Vacuum Science & Technology, B - Microelectronics and Nanometer Structures
dash.depositing.authorCapasso, Federico::c84ca12d0f20adc982c7c314bebd7c9e::600
dc.date.available2019-09-17T15:35:23Z
dash.workflow.comments1Science Serial ID 57542
dc.identifier.doi10.1116/1.1627815
dash.source.volume21;6
dash.source.page2907


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