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dc.contributor.authorEbina, Wataru
dc.contributor.authorRowat, Amy C.
dc.contributor.authorWeitz, David A.
dc.date.accessioned2019-10-09T13:56:23Z
dc.date.issued2009
dc.identifier.citationEbina, Wataru, Amy C. Rowat, and David A. Weitz. 2009. “Electrodes on a Budget: Micropatterned Electrode Fabrication by Wet Chemical Deposition.” Biomicrofluidics3 (3): 034104. https://doi.org/10.1063/1.3224669.
dc.identifier.issn1932-1058
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:41511248*
dc.description.abstractPrecise patterning of metals is required for diverse microfluidic and microelectro-mechanical system (MEMS) applications ranging from the separation of proteins to the manipulation of single cells and drops of water-in-oil emulsions. Here we present a very simple, inexpensive method for fabricating micropatterned electrodes. We deposit a thin metal layer of controlled thickness using wet chemistry, thus eliminating the need for expensive equipment typically required for metal deposition. We demonstrate that the resulting deposited metal can be used to fabricate functional electrodes: The wet-deposited metal film can sustain patterning by photolithography down to micron-sized features required for MEMS and microfluidic applications, and its properties are suitable for operative electrodes used in a wide range of microfluidic applications for biological studies.
dc.language.isoen_US
dc.publisherAIP Publishing
dash.licenseLAA
dc.titleElectrodes on a budget: Micropatterned electrode fabrication by wet chemical deposition
dc.typeJournal Article
dc.description.versionVersion of Record
dc.relation.journalBiomicrofluidics
dash.depositing.authorWeitz, David A.::4c144b06be6d094b21dbe2dd12dbef76::600
dc.date.available2019-10-09T13:56:23Z
dash.workflow.comments1Science Serial ID 16005
dc.identifier.doi10.1063/1.3224669
dash.source.volume3;3


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