The Effect of Porogen Loading on the Stiffness and Fracture Energy of Brittle Organosilicates

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The Effect of Porogen Loading on the Stiffness and Fracture Energy of Brittle Organosilicates

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Title: The Effect of Porogen Loading on the Stiffness and Fracture Energy of Brittle Organosilicates
Author: Li, Han; Lin, Youbo; Tsui, Ting Y.; Vlassak, Joost J.

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Citation: Li, Han, Youbo Lin, Ting Y. Tsui, and Joost J. Vlassak. 2009. The effect of porogen loading on the stiffness and fracture energy of brittle organosilicates. Journal of Materials Research 24(1): 107-116.
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Abstract: Integrating porous low-permittivity dielectrics into Cu metallization is one of the strategies to reduce power consumption, signal propagation delays, and crosstalk between interconnects for the next generation of integrated circuits. The porosity and pore structure of these low-k dielectric materials, however, also affect other important
material properties in addition to the dielectric constant. In this paper, we investigate the impact of porogen loading on the stiffness and cohesive fracture energy of a series of porous organosilicate glass (OSG) thin films using nanoindentation and the doublecantilever beam (DCB) technique. The OSG films were deposited by plasma-enhanced chemical vapor deposition (PECVD) and had a porosity in the range of 7~45%. We show that the degree of porogen loading during the deposition process changes both the network structure and the porosity of the dielectric, and we resolve the contributions of both effects to the stiffness and fracture energy of the films. The experimental results
for stiffness are compared with micromechanical models and finite element calculations. It is demonstrated that the stiffness of the OSG films depends sensitively on their porosity and that considerable improvements in stiffness may be obtained through further optimization of the pore microstructure. The cohesive fracture energy of the films decreases linearly with increasing porosity, consistent with a simple planar through-pore fracture mechanism.
Published Version: doi:10.1557/jmr.2009.0005
Terms of Use: This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:4263767
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