Show simple item record

dc.contributor.authorLi, Han
dc.contributor.authorLin, Youbo
dc.contributor.authorTsui, Ting Y.
dc.contributor.authorVlassak, Joost J.
dc.date.accessioned2010-06-28T14:24:37Z
dc.date.issued2009
dc.identifier.citationLi, Han, Youbo Lin, Ting Y. Tsui, and Joost J. Vlassak. 2009. The effect of porogen loading on the stiffness and fracture energy of brittle organosilicates. Journal of Materials Research 24(1): 107-116.en_US
dc.identifier.issn0884-2914en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:4263767
dc.description.abstractIntegrating porous low-permittivity dielectrics into Cu metallization is one of the strategies to reduce power consumption, signal propagation delays, and crosstalk between interconnects for the next generation of integrated circuits. The porosity and pore structure of these low-k dielectric materials, however, also affect other important material properties in addition to the dielectric constant. In this paper, we investigate the impact of porogen loading on the stiffness and cohesive fracture energy of a series of porous organosilicate glass (OSG) thin films using nanoindentation and the doublecantilever beam (DCB) technique. The OSG films were deposited by plasma-enhanced chemical vapor deposition (PECVD) and had a porosity in the range of 7~45%. We show that the degree of porogen loading during the deposition process changes both the network structure and the porosity of the dielectric, and we resolve the contributions of both effects to the stiffness and fracture energy of the films. The experimental results for stiffness are compared with micromechanical models and finite element calculations. It is demonstrated that the stiffness of the OSG films depends sensitively on their porosity and that considerable improvements in stiffness may be obtained through further optimization of the pore microstructure. The cohesive fracture energy of the films decreases linearly with increasing porosity, consistent with a simple planar through-pore fracture mechanism.en_US
dc.description.sponsorshipEngineering and Applied Sciencesen_US
dc.language.isoen_USen_US
dc.publisherMaterials Research Societyen_US
dc.relation.isversionofdoi:10.1557/jmr.2009.0005en_US
dash.licenseOAP
dc.titleThe Effect of Porogen Loading on the Stiffness and Fracture Energy of Brittle Organosilicatesen_US
dc.typeJournal Articleen_US
dc.description.versionAccepted Manuscripten_US
dc.relation.journalJournal of Materials Researchen_US
dash.depositing.authorVlassak, Joost J.
dc.date.available2010-06-28T14:24:37Z
dc.identifier.doi10.1557/jmr.2009.0005*
dash.contributor.affiliatedLin, Youbo
dash.contributor.affiliatedVlassak, Joost


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record