Inorganic Islands on a Highly Stretchable Polyimide Substrate

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Inorganic Islands on a Highly Stretchable Polyimide Substrate

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Title: Inorganic Islands on a Highly Stretchable Polyimide Substrate
Author: Vlassak, Joost J.; Sun, Jeong-Yun; Lu, Nanshu; Yoon, Juil; Oh, Kyu-Hwan; Suo, Zhigang

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Citation: Sun, Jeong-Yun, Nanshu Lu, Juil Yoon, Kyu-Hwan Oh, Zhigang Suo, and Joost J. Vlassak. 2009. Inorganic islands on a highly stretchable polyimide substrate. Journal of Materials Research 24(11): 3338-3342.
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Abstract: For a flexible electronic device integrating inorganic materials on a polymer substrate, the polymer can deform substantially, but the inorganic materials usually fracture at small strains. This paper describes an approach to make such a device highly stretchable. A
polyimide substrate is first coated with a thin layer of an elastomer, on top of which SiNx islands are fabricated. When the substrate is stretched to a large strain, the SiNx islands remain intact. Calculations confirm that the elastomer reduces the strain in the SiNx islands by orders of magnitude.
Published Version: doi:10.1557/JMR.2009.0417
Terms of Use: This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:4263768
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