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dc.contributor.authorMcCluskey, Patrick James
dc.contributor.authorVlassak, Joost J.
dc.date.accessioned2010-07-26T13:46:51Z
dc.date.issued2010
dc.identifier.citationMcCluskey, Patrick James, and Joost J. Vlassak. Forthcoming. Nano-thermal transport array: An instrument for combinatorial measurements of heat transfer in nanoscale films. Thin Solid Films 518.en_US
dc.identifier.issn0040-6090en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:4317715
dc.description.abstractThe nano-Thermal Transport Array is a silicon-based micromachined device for measuring the thermal properties of nanoscale materials in a high-throughput methodology. The device contains an array of thermal sensors, each one of which consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The thermal behavior of the sensors is described with an analytical model. The assumptions underlying this model and its accuracy are checked using the finite element method. The analytical model is used in a data reduction scheme that relates experimental quantities to materials properties. Measured properties include thermal effusivity, thermal conductivity, and heat capacity. While the array is specifically designed for combinatorial analysis, here we demonstrate the capabilities of the device with a high-throughput study of copper multi-layer films as a function of film thickness, ranging from 15 to 470 nm. Thermal conductivity results show good agreement with earlier models predicting the conductivity based on electron scattering at interfaces.en_US
dc.description.sponsorshipEngineering and Applied Sciencesen_US
dc.language.isoen_USen_US
dc.publisherElsevieren_US
dc.relation.isversionofdoi:10.1016/j.tsf.2010.05.124en_US
dash.licenseOAP
dc.subjectnanoscaleen_US
dc.subjecthigh-throughputen_US
dc.subjectcombinatorialen_US
dc.subjectspecific heaten_US
dc.subjectthermal effusivityen_US
dc.subjectthermal conductivityen_US
dc.subjectemissivityen_US
dc.subjectcopperen_US
dc.titleNano-Thermal Transport Array: An Instrument for Combinatorial Measurements of Heat Transfer in Nanoscale Filmsen_US
dc.typeJournal Articleen_US
dc.description.versionAccepted Manuscripten_US
dc.relation.journalThin Solid Filmsen_US
dash.depositing.authorVlassak, Joost J.
dc.date.available2010-07-26T13:46:51Z
dc.identifier.doi10.1016/j.tsf.2010.05.124*
dash.contributor.affiliatedMcCluskey, Patrick
dash.contributor.affiliatedVlassak, Joost


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