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dc.contributor.authorBranton, Daniel
dc.contributor.authorHan, Anpan
dc.contributor.authorVlassarev, Dimitar Mihaylov
dc.contributor.authorWang, Jenny Yingzi
dc.contributor.authorGolovchenko, Jene A.
dc.date.accessioned2011-01-04T14:42:09Z
dc.date.issued2010
dc.identifier.citationHan, Anpan, Dimitar Vlassarev, Jenny Wang, Jene A. Golvchenko, and Daniel Branton. 2010. Nano Letters 10(12): 5056-5059.en_US
dc.identifier.issn1530-6984en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:4635033
dc.description.abstractWe report the successful application of a new approach, ice lithography (IL), to fabricate nanoscale devices. The entire IL process takes place inside a modified scanning electron microscope (SEM), where a vapor-deposited film of water ice serves as a resist for e-beam lithography, greatly simplifying and streamlining device fabrication. We show that labile nanostructures such as carbon nanotubes can be safely imaged in an SEM when coated in ice. The ice film is patterned at high e-beam intensity and serves as a mask for lift-off without the device degradation and contamination associated with e-beam imaging and polymer resist residues. We demonstrate the IL preparation of carbon nanotubes field effect transistors (FETs) with high quality trans-conductance properties.en_US
dc.description.sponsorshipEngineering and Applied Sciencesen_US
dc.description.sponsorshipMolecular and Cellular Biologyen_US
dc.description.sponsorshipPhysicsen_US
dc.language.isoen_USen_US
dc.publisherAmerican Chemical Societyen_US
dc.relation.isversionofdoi:10.1021/nl1032815en_US
dash.licenseOAP
dc.subjecte-beam lithographyen_US
dc.subjectcarbon nanotubeen_US
dc.subjectfield effect transistoren_US
dc.subjectnano-deviceen_US
dc.titleIce Lithography for Nano-Devicesen_US
dc.typeJournal Articleen_US
dc.description.versionAccepted Manuscripten_US
dc.relation.journalNano Lettersen_US
dash.depositing.authorBranton, Daniel
dc.date.available2011-01-04T14:42:09Z
dc.identifier.doi10.1021/nl1032815*
dash.authorsorderedfalse
dash.contributor.affiliatedVlassarev, Dimitar Mihaylov
dash.contributor.affiliatedWang, Jenny Yingzi
dash.contributor.affiliatedHan, Anpan
dash.contributor.affiliatedGolovchenko, Jene
dash.contributor.affiliatedBranton, Daniel


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