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Chemical Vapor Deposition of Cobalt-based Thin Films for Microelectronics
In microelectronics, the device size continues to shrink to improve the performance and functionality, which sets technical challenges for the integrated circuit (IC) fabrication. Novel materials and processing techniques ...
Diffusion, Deformation, and Damage in Lithium-Ion Batteries and Microelectronics
This thesis explores mechanical behavior of microelectronic devices and lithium-ion batteries. We first examine electromigration-induced void formation in solder bumps by constructing a theory that couples electromigration ...