Thermal Activation and Saturation of Ion Beam Sculpting

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Thermal Activation and Saturation of Ion Beam Sculpting

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Title: Thermal Activation and Saturation of Ion Beam Sculpting
Author: Hoogerheide, David Paul; George, H. Bola; Golovchenko, Jene A.; Aziz, Michael J.

Note: Order does not necessarily reflect citation order of authors.

Citation: Hoogerheide, David P., H. Bola George, Jene A. Golovchenko, and Michael J. Aziz. 2011. Thermal activation and saturation of ion beam sculpting. Journal of Applied Physics 109(7): 074312.
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Abstract: We report a material-dependent critical temperature for ion beam sculpting of nanopores in amorphous materials under keV ion irradiation. At temperatures below the critical temperature, irradiated pores open at a rate that soon saturates with decreasing temperature. At temperatures above the critical temperature, the pore closing rate rises rapidly and eventually saturates with increasing temperature. The observed behavior is well described by a model based on adatom diffusion, but is difficult to reconcile with an ion-stimulated viscous flow model.
Published Version: doi:10.1063/1.3569705
Other Sources: http://www.physics.harvard.edu/~hoogerheide/papers/Hoogerheide%20JAP%20109%20074312%202011.pdf
Terms of Use: This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:5345188
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