Tunable Nanometer Electrode Gaps by MeV Ion Irradiation

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Tunable Nanometer Electrode Gaps by MeV Ion Irradiation

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Title: Tunable Nanometer Electrode Gaps by MeV Ion Irradiation
Author: Cheang-Wong, Juan Carlos; Narumi, K.; Schürmann, Gregor M.; Aziz, Michael J.; Golovchenko, Jene A.

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Citation: Cheang-Wong, Juan Carlos, K. Narumi, Gregor M. Schürmann, Michael J. Aziz, and Jene A. Golovchenko. 2012. Tunable nanometer electrode gaps by MeV ion irradiation. Applied Physics Letters 100(15): 153108.
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Abstract: We report the use of MeV ion-irradiation-induced plastic deformation of amorphous materials to fabricate electrodes with nanometer-sized gaps. Plastic deformation of the amorphous metal \(\text{Pd}_{80}\text{Si}_{20}\) is induced by \(4.64 \text{MeV O}^{2+}\) ion irradiation, allowing the complete closing of a sub-micrometer gap. We measure the evolving gap size in situ by monitoring the field emission current-voltage (I-V) characteristics between electrodes. The I-V behavior is consistent with Fowler-Nordheim tunneling. We show that using feedback control on this signal permits gap size fabrication with atomic-scale precision. We expect this approach to nanogap fabrication will enable the practical realization of single molecule controlled devices and sensors.
Published Version: doi:10.1063/1.3702778
Terms of Use: This article is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http://nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP
Citable link to this page: http://nrs.harvard.edu/urn-3:HUL.InstRepos:8835477
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