Subscriber access provided by HARVARD UNIV Communication Integrated diamond networks for quantum nanophotonics Birgit J. M. Hausmann, Brendan Shields, Qimin Quan, Patrick Maletinsky, Murray McCutcheon, Jennifer T Choy, Tom M. Babinec, Alexander Kubanek, Amir Yacoby, Mikhail D. Lukin, and Marko Loncar Nano Lett., Just Accepted Manuscript • Publication Date (Web): 16 Feb 2012 Downloaded from http://pubs.acs.org on February 17, 2012 Just Accepted “Just Accepted” manuscripts have been peer-reviewed and accepted for publication. They are posted online prior to technical editing, formatting for publication and author proofing. 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Page 1 of 11 Nano Letters 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 ACS Paragon Plus Environment Nano Letters Page 2 of 11 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 ACS Paragon Plus Environment Page 3 of 11 Nano Letters 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 ACS Paragon Plus Environment Nano Letters Page 4 of 11 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 (a) Deep etch via ICP RIE (b) ICP RIE Ebeam Lithography (c) objective sample DM excitation SM (d) 3500 Intensity (Counts) 3000 686.1 686.3 686.5 λ (nm) data t 2500 2000 1500 675 680 685 690 C2 C1 5 µm λ (nm) ACS Paragon Plus Environment Page 5 of 11 Nano Letters 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 (b) 300 250 Intensity (a.u.) 200 150 100 50 0 640 650 660 670 680 λ (nm) 690 700 710 720 ACS Paragon Plus Environment Nano Letters Page 6 of 11 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 (a) C 11 5 µm (c) 1.5 1 g2 (t ) g2 (t ) 0.5 0 (g) (b) 8 x 10 4 C 22 0 (d) 1.5 5 µm C 21 C 23 3 x 104 0 C 22 versus C11 C 21 versus C11 (e) 1.5 g2 (t ) 1 0.5 0 (h) 5000 Intenisty (counts) 4000 3000 2000 C 23 versus C11 1 0.5 0 data t 0.2 0.21 data t 0.28 data t (f) 3000 Intensity (Counts) 2500 2000 1500 0 200 400 600 Delay Time (ns) 0 200 400 600 Delay Time (ns) 0 200 400 600 Delay Time (ns) Quantum routed elds C 22 Free space emission C 11 + C 21 Intensity (counts) 7000 6000 5000 4000 Quantum routed elds C 23 R R R 600 (i) 140x10 Counts Per Second 3 700 800 λ (nm) 600 700 800 λ (nm) (k) 14x10 Counts Per Second 3 600 700 800 λ (nm) 120 100 80 60 1.0 net free space emission t 2.0 P (mW) 3.0 12 10 8 6 1.0 net routed elds t 2.0 3.0 P(mW) ACS Paragon Plus Environment (a) Page 7 of 11 Deep etch via ICP RIE (b) Nano Letters 1 2 3 4 5 6 7 8 9 10 (c) 11 12 13 14 15 16 17 18 19 20 21 22 ICP RIE Ebeam Lithography objective sample DM excitation SM (d) 3500 Intensity (Counts) 3000 686.1 686.3 686.5 λ (nm) data t 2500 C2 C1 2000 ACS Paragon Plus Environment 1500 5 µm 675 680 λ (nm) 685 690 Nano Letters Page 8 of 11 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 ACS Paragon Plus Environment (b) Page 9 of 11 300 250 1 2 200 3 4 150 5 6 100 7 50 8 9 0 10 640 11 Nano Letters Intensity (a.u.) ACS Paragon Plus Environment 650 660 670 680 λ (nm) 690 700 710 720 (a) C 11 (b) 8 x 10 4 Nano Letters C 22 C 21 3 104 Page 10 ofx11 C 23 0 1 5 µm 2 5 µm 0 3 4 5 (c) (d) C 22 versus C11 C 21 versus C11 6 1.5 7 8 1.5 9 1 10 1 11 12 0.5 data 13 0.5 data t t 14 0.2 0.21 15 0 16 0 0 200 400 600 0 200 400 600 17 Delay Time (ns) Delay Time (ns) 18 (f) (g) 19 Free space emission C 11 + C 21 Quantum routed elds C 22 20 213000 R 22 7000 R 232500 24 6000 25 2000 26 27 5000 281500 29 4000 30 600 700 800 600 700 800 31 λ (nm) λ (nm) 32 33 (i) (k) 3 34140x103 14x10 35 36 120 12 37 100 38 10 39 80 40 8 net free space emission 41 60 t 42 6 ACS Paragon Plus Environment 43 44 1.0 2.0 3.0 45 P (mW) g2 (t ) g2 (t ) Intensity (counts) Counts Per Second Counts Per Second (e) 1.5 g2 (t ) 1 0.5 0 (h) C 23 versus C11 0.28 data t 0 200 400 600 Delay Time (ns) Quantum routed elds C 23 5000 Intenisty (counts) Intensity (Counts) R 4000 3000 2000 600 700 800 λ (nm) net routed elds t 1.0 2.0 3.0 P(mW) Page 11 of 11 2 µm Nano Letters 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 1.5 19 20 1 21 22 23 0.5 24 25 0 26 27 2 µm 8 x 10 4 NV 5 µm 0 C 22 versus C11 Intensity (Counts) Quantum routed elds C 22 3000 2500 2000 R g2 (t ) data t 1500 0.2 Paragon Plus Environment ACS 0 200 400 600 Delay Time (ns) 600 700 800 λ (nm)