Sun, WeiShen, JieZhao, ZhaoArellano, NoelRettner, CharlesTang, JianshiCao, TianyangZhou, ZhiyuTa, ToanStreit, Jason K.Fagan, Jeffrey A.Schaus, ThomasZheng, MingHan, Shu-JenShih, WilliamMaune, Hareem T.Yin, Peng2022-08-312020-05-21Sun, Wei, Shen, Jie, Zhao, Zhao, Arellano, Noel, Rettner, Charles, Tang, Jianshi, Cao, Tianyang, Zhou, Zhiyu, Ta, Toan, Streit, Jason K, Fagan, Jeffrey A, Schaus, Thomas, Zheng, Ming, Han, Shu-Jen, Shih, William M, Maune, Hareem T, and Yin, Peng. "Precise Pitch-scaling of Carbon Nanotube Arrays within Three-dimensional DNA Nanotrenches." Science (American Association for the Advancement of Science) 368, no. 6493 (2020): 874-77.0036-80751095-9203https://nrs.harvard.edu/URN-3:HUL.INSTREPOS:37373114Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely-aligned evenly-spaced arrays is required for the ultra-scaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics (SHINE). Specifically, by using DNA brick crystal based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with uniform pitch as small as 10.4 nanometers, at an angular deviation less than 2 degrees and an assembly yield > 95%.en-USMultidisciplinaryJournal Article2022-08-3110.1126/science.aaz7440