Tennant, D. M.Colombelli, R.Srinivasan, K.Troccoli, M.Painter, O.Gmachl, C.Capasso, F.Sergent, A. M.Sivco, D. L.Cho, A. Y.2019-09-172003Tennant, D. M., R. Colombelli, K. Srinivasan, M. Troccoli, O. Painter, C. Gmachl, F. Capasso, A. M. Sergent, D. L. Sivco, and A. Y. Cho. 2003. “Fabrication Methods for a Quantum Cascade Photonic Crystal Surface Emitting Laser.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (6): 2907. https://doi.org/10.1116/1.1627815.1071-10231520-8567http://nrs.harvard.edu/urn-3:HUL.InstRepos:41372485Conventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers. 2003 American Vacuum Society.en-USJournal Article2019-09-1710.1116/1.1627815