Quan, QiminDeotare, Parag B.Loncar, Marko2019-10-032010Quan, Qimin, Parag B. Deotare, and Marko Loncar. 2010. “Photonic Crystal Nanobeam Cavity Strongly Coupled to the Feeding Waveguide.” Applied Physics Letters 96 (20): 203102. https://doi.org/10.1063/1.3429125.0003-69511077-31181520-8842http://nrs.harvard.edu/urn-3:HUL.InstRepos:41461295A deterministic design of an ultrahigh Q-factor, wavelength-scale photonic crystal nanobeam cavity is proposed and experimentally demonstrated. Using this approach, cavities with Q>10(6) and on-resonance transmission T>90% are designed. The devices, fabricated in silicon and capped with a low refractive index polymer, have experimental Q=80 000 and T=73%. This is, to the best of our knowledge, the highest transmission measured in deterministically designed, wavelength-scale high-Q cavities.en-USJournal Article2019-10-0310.1063/1.3429125