Aziz, MichaelBoatner, L. A.Rankin, J.White, C. Woody2009-04-291987Aziz, Michael J., L. A. Boatner, J. Rankin, and C. W. White. 1987. Ion Implantation and Annealing of SrTiO3 and CaTiO3. Materials Research Society Symposium Proceedings 93: 9-13.0272-9172http://nrs.harvard.edu/urn-3:HUL.InstRepos:2839216Ion implantation damage and thermal annealing results are presented for single crystals of SrTiO₃ and CaTiO₃. The near-surface region of both of these materials can be made amorphous by low doses (~10¹⁵/cm²) of heavy ions (PB at 540 KeV). During annealing, the amorphous implanted region crystallizes epitaxially on the underlying single-crystal substrate. The kinetics of this solid-phase epitaxial recrystallization process have been measured by employing ion channeling techniques.en-US10.1557/PROC-93-9