Cheang-Wong, Juan CarlosNarumi, K.Schürmann, Gregor M.Aziz, MichaelGolovchenko, Jene2012-06-052012Cheang-Wong, Juan Carlos, K. Narumi, Gregor M. Schürmann, Michael J. Aziz, and Jene A. Golovchenko. 2012. Tunable nanometer electrode gaps by MeV ion irradiation. Applied Physics Letters 100(15): 153108.0003-69511077-3118http://nrs.harvard.edu/urn-3:HUL.InstRepos:8835477We report the use of MeV ion-irradiation-induced plastic deformation of amorphous materials to fabricate electrodes with nanometer-sized gaps. Plastic deformation of the amorphous metal \(\text{Pd}_{80}\text{Si}_{20}\) is induced by \(4.64 \text{MeV O}^{2+}\) ion irradiation, allowing the complete closing of a sub-micrometer gap. We measure the evolving gap size in situ by monitoring the field emission current-voltage (I-V) characteristics between electrodes. The I-V behavior is consistent with Fowler-Nordheim tunneling. We show that using feedback control on this signal permits gap size fabrication with atomic-scale precision. We expect this approach to nanogap fabrication will enable the practical realization of single molecule controlled devices and sensors.en-USamorphous stateelectrodesenergy gapfield emissionion beam effectsnanostructured materialspalladium alloysplastic deformationsilicon alloystunnellingJournal Article2012-06-0510.1063/1.3702778