Sinsermsuksakul, PrasertHeo, JaeyeongGordon, Roy2012-09-262011Sinsermsuksakul, Prasert, Jaeyeong Heo, and Roy G. Gordon. 2011. Atomic layer deposition and chemical vapor deposition of tin(II) sulfide. Paper presented at The 11th International Conference on Atomic Layer Deposition, Cambridge, MA, June 26-29, 2011.http://nrs.harvard.edu/urn-3:HUL.InstRepos:9639971en-USConference Paper2012-09-26