Investigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Formamidinates for Metallic Cobalt by ALD/CVD

Wang, Qing MinLehn, Jean-SebastienLi, HuazhiShenai, DeoYang, JingGordon, Roy2013-10-222011Wang, Qing Min, Jean-Sebastien Lehn, Huazhi Li, Deo Shenai, Jing Yang, and Gordon, Roy G. 2011 Investigation of thermal stability and delivery of cobalt amidinates and novel cobalt formamidinates for metallic cobalt by ALD/CVD. Paper presented at the AVS Atomic Layer Deposition Conference, Boston, MA.http://nrs.harvard.edu/urn-3:HUL.InstRepos:11190323en-USInvestigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Formamidinates for Metallic Cobalt by ALD/CVDOther2013-07-15Wang, Qing Min; Lehn, Jean-Sebastien; Li, Huazhi; Shenai, Deo; Yang, Jing; Gordon, Roy G.2013-10-22