Burek, Michaelde Leon, Nathalie PulmonesShields, Brendan JohnHausmann, Birgit Judith MariaChu, YiwenQuan, QiminZibrov, AlexanderPark, HongkunLukin, MikhailLoncar, Marko2017-08-072012Burek, Michael J., Nathalie P. de Leon, Brendan J. Shields, Birgit J. M. Hausmann, Yiwen Chu, Qimin Quan, Alexander S. Zibrov, Hongkun Park, Mikhail D. Lukin, and Marko Lon?ar. 2012. “Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond.” Nano Letters 12 (12) (December 12): 6084–6089. doi:10.1021/nl302541e.1530-6984http://nrs.harvard.edu/urn-3:HUL.InstRepos:33717988A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.en-USNanofabrication; nanophotonics; nanomechanical systems; diamond; photonic crystalJournal Article2014-02-24Mikhail Lukin2017-08-0710.1021/nl302541e