Burek, MichaelChu, YiwenLiddy, Madelaine S. Z.Patel, ParthRochman, JakeMeesala, SrujanHong, WooyoungQuan, QiminLukin, MikhailLoncar, Marko2015-07-092014Burek, Michael J., Yiwen Chu, Madelaine S. Z. Liddy, Parth Patel, Jake Rochman, Srujan Meesala, Wooyoung Hong, Qimin Quan, Mikhail D. Lukin, and Marko Lončar. 2014. “High Quality-Factor Optical Nanocavities in Bulk Single-Crystal Diamond.” Nature Communications 5: 5718.2041-1723http://nrs.harvard.edu/urn-3:HUL.InstRepos:17192248Single-crystal diamond, with its unique optical, mechanical and thermal properties, has emerged as a promising material with applications in classical and quantum optics. However, the lack of heteroepitaxial growth and scalable fabrication techniques remains the major limiting factors preventing more wide-spread development and application of diamond photonics. In this work, we overcome this difficulty by adapting angled-etching techniques, previously developed for realization of diamond nanomechanical resonators, to fabricate racetrack resonators and photonic crystal cavities in bulk single-crystal diamond. Our devices feature large optical quality factors, in excess of 105, and operate over a wide wavelength range, spanning visible and telecom. These newly developed high-Q diamond optical nanocavities open the door for a wealth of applications, ranging from nonlinear optics and chemical sensing, to quantum information processing and cavity optomechanics.en-USPhysical sciencesApplied physicsNanotechnologyJournal Article2015-07-0910.1038/ncomms6718